PENGEMBANGAN FOUR POINT PROBE UNTUK MENGUKUR RESISTANSI RESISTOR DAN KARAKTERISASI SEMIKONDUKTOR; Development Four Point Probe For Measuring Resistor’s Resistance and Characterization of Semiconductor

Al Hakim, Yusro, Kuwat Triyana

2015 | Disertasi | FMIPA

Four Point Probe (4-PP) Instrumen for measuring resistor’s resistance, and characterization of semiconductor was done.The instrument showed a good performance in measuring resistor’s resistance. The highest degree of accuray reached around 98,20% and the lowest is 61,90% with good precision compared with other high tracebilited Insrument SANWA CD 800a. 4-PP Instrument also designed for characterization of semiconductor. This electrical characterization including resistancy, resistivity, conductivity and mobility of semiconductor. In this experiment Silicon sample had used. This measurement result Silicon sample’s resistance around (4,157 ± 0,015 %) ?, resistivity (1,808 x 10-3 ± 0,015 %) ?.cm, conductivity ? (5,53 x 102 ± 0,015 %) S.cm-1 and mobility (3,21 x 10-4 ± 0,051 %) cm2S-1V-1. The conductivity of sample is still in range with reference. It has accuracy 82,29% compared with Veeco Four Point Probe BATAN Yogyakarta. There are some fitures in this Instrument such as current source external, technique of measuring, voltmeter external dan amperemeter external so this instrument will compatible with other used instrument depend on condition of sample. For development instrument, advance quality of hardware and using software for data acquitision must be developed together for increasing it’s performance.

Kata Kunci : 4-PP; resistor; characterization semiconductor; development