PERHITUNGAN KONSTANTA DIELEKTRIK FILM TIPIS GRAPHENE EPITAXIAL MULTILAYER C-FACE HASIL PENGUKURAN SPECTROSCOPIC ELLIPSOMETRY DENGAN METODE INVERSI NUMERIK GAUSS-NEWTON; CALCULATION OF THE DIELECTRIC CONSTANT OF THIN FILM C-FACE MULTILAYER EPITAXIAL GRAPHENE MEASURED BY SPECTROSCOPIC ELLIPSOMETRY USING GAUSS-NEWTON INVERSION METHOD

HERVIN MAULINA, Kamsul Abraha

2014 | Disertasi | PROGRAM STUDI S-2 FISIKA

The absence of extraction method of the dielectric constant that is more efficient underlies the calculation of the dielectric constant C-face multilayer epitaxial graphene from the measurement result of spectroscopic ellipsometry using Gauss-Newton inversion method. The purpose of this study is to calculate numerically and interpret the refractive index, dielectric constant, and optical conductivity of C-face multilayer epitaxial graphene. Extraction of dielectric constant performed through the data inversion of psi (? ) and delta (?) from spectroscopic ellipsometry measurement with the incident angle of 70o. In this study, an analysis to determine the excitonic lifetime was done by phenomenological Fano model. Equations that are used in extracting the dielectric constant of C-face multilayer epitaxial graphene involve Fresnel and Snell's equations. The results showed three important things: 1) the method of Gauss-Newton numerical inversion can be used to extract the dielectric constant of C-face multilayer epitaxial graphene, 2) asymmetric absorption peak at 4,56 eV in terms of the imaginary part of the dielectric constant and refractive index, and 3) there is an asymmetric exitonic resonance peak at 4,56 eV of optical conductivity due to interplay electron-electron and electron-hole

Kata Kunci : Konstanta dielektrik; spectroscopic ellipsometry; Gauss-Newton